2 edition of Mark I Gridless Ion Source found in the catalog.
Mark I Gridless Ion Source
Commonwealth Scientific Corporation (Alexandria, Va.)
Issued in binder.
|Other titles||Mark One Gridless Ion Source., Mark 1 Gridless Ion Source.|
|LC Classifications||QC702.3 .C65 1988 Suppl.|
|The Physical Object|
|Pagination||1 v. (loose-leaf) :|
|LC Control Number||89104256|
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Mark I+ Gridless Ion Source. Provides High Beam Current for Vacuum Coating Processes. Ideally suited to surface pre-clean, assisted deposition and select etch applications, the Mark I+ gridless ion source provides a high beam current designed for vacuum coating processes, improving process uniformity and preventing substrate damage.
Veeco Mark II+ Gridless Ion Source Using intense magnetic fields and substantial electron currents, Veeco’s low maintenance, gridless ion sources produce a very high current density at lower Mark I Gridless Ion Source book than is practical with gridded sources.
Gridless sources are available in several sizes and can be configured with or without filaments. A variety of ion source types exist. Confusion often exists when trying to select the correct ion source to suit given process requirements. RF or DC. Gridded or End-Hall Gridless.
Ion beam milling, deposition, just substrate precleaning or ion beam assisted deposition. Here we compare the generic gridded Kaufman ion source types. Mark II+ Gridless Ion Source. Increased Beam Output and Improved Maintenance Features. Dramatically increased beam current and a removable anode assembly adds new value to the Mark II+ End-Hall Ion Source, providing an evolutionary improvement to Veeco’s industry-leading line of gridless ion sources for optical coating systems.
cluded four types of ion sources: the Ion Tech gridded Kaufman source, the Denton Cold Cathode CCR, the Commonwealth Scientific Mark II End Hall source, and a high power plasma source of our own design.
In all cases, our pro-cess speed was limited by the rate at which we could deposit the materials and obtain the desired properties. This. Everything else being equal, the maximum ion beam current with krypton is only 69% the maximum ion current of an argon beam, and with xenon the ratio drops to 55%.
Gridless ion sources. In a gridless ion source, ions are generated by a flow of electrons (no grids). The most common gridless ion source is the end-Hall ion source. Here, the. Modern retrofit sets for Veecos powesupplies for MARK II end-Hall Ion Sources. Filament- Discharge- and Gas controller with integrated process sequencer and an integrated MARK II-compatible interface.
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Please allow days for processing before shipment. Spherical ion current density profiles for the KRI End-Hall ion source with the source at the center of the sphere.
Source to target distance is 30 cm (12 in.). The working gas is argon Flat target ion current density profiles for the KRI End-Hall ion source. Read writing from Gridless Power on medium. We make portable, reliable, and efficient power a reality with the Gridless Core - the world's smartest battery.
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Sioe T Mak received his Diploma in Electrical Engineering from the University of Indonesia, the MSc and PhD in EE from the Illinois Institute of Technology in Chicago. He was Senior Staff Scientist at the Distribution Control Systems, Inc., a subsidiary of ESCO Technologies Corp.
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